Stanley,
There are two major factors that affect the accuracy and stability of scalar measurements:
1) The stability and phase noise of the TG
2) VSWR
There isn’t a lot you can do about the TG, but adding 3-6 dB fixed SMA attenuators on the output of the TG and the input of the SA and keeping them there for both the thru measurement and the DUT measurement can improve measurements quite a bit by reducing VSWR.
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